Surface warpage metrology from Global (mm) to Local (nm) in one shot measurement - Highest Lateral Resolution : 20Mpixels to cover 20mm2
D-Surface View is intended to analyze flat surfaces up to 300-mm diameter. The equipment can be used for example for wafer surface quality control, it qualifies surface roughness, shape, flatness, warpage and nano-topography, other applications can be automotive mirrors or optical components.
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