High Resolution Deflectometry

High Resolution Deflectometry

Surface warpage metrology from Global (mm) to Local (nm) in one shot measurement - Highest Lateral Resolution : 20Mpixels to cover 20mm2

D-Surface View

D-Surface View

D-Surface View is intended to analyze flat surfaces up to 300-mm diameter. The equipment can be used for example for wafer surface quality control, it qualifies surface roughness, shape, flatness, warpage and nano-topography, other applications can be automotive mirrors or optical components.

Learn More